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      Ion-beam induced relaxation of strained GexSi1−x layers

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          Journal
          Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
          Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
          Elsevier BV
          0168583X
          March 1995
          March 1995
          : 96
          : 1-2
          : 276-280
          Article
          10.1016/0168-583X(94)00499-4
          93c014a7-f6de-459a-b9e1-d3f980464eda
          © 1995

          https://www.elsevier.com/tdm/userlicense/1.0/

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