Journal ID (publisher-id): JVTAD6
Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Abbreviated Title:
J. Vac. Sci. Technol. A
Publisher:
American Vacuum Society
ISSN
(Print):
07342101
Publication date Created: 2005
Publication date
(Print):
2005
Volume: 23
Issue: 4
Page: 982
Article
DOI: 10.1116/1.1913677
SO-VID: 94711258-be11-40a4-a528-1b84248a33cd
Copyright © ©
2005