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      Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

      Author(s): ,
      Publication date Created:
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      Journal: Applied Surface Science
      Publisher: Elsevier BV

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          Electrical properties of solid oxide electrolytes

          T. H. Etsell, Spyridon N. Flengas (1970)
          Article 0 comments Cited 106 times – based on 0 reviews     Review now
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            Atomic layer epitaxy

            Tuomo Suntola (1992)
            Article 0 comments Cited 87 times – based on 0 reviews     Review now
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              Growth of titanium dioxide thin films by atomic layer epitaxy

              Pekka Soininen, Mikko Ritala, Markku Leskelä … (1993)
              Article 0 comments Cited 65 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Applied Surface Science
                Abbreviated Title: Applied Surface Science
                Publisher: Elsevier BV
                ISSN (Print): 01694332
                Publication date Created: January 1994
                Publication date (Print): January 1994
                Volume: 75
                Issue: 1-4
                Pages: 333-340
                Article
                DOI: 10.1016/0169-4332(94)90180-5
                SO-VID: 949afdeb-6594-43fa-9359-1eff10259632
                Copyright © © 1994
                License:

                http://www.elsevier.com/tdm/userlicense/1.0/

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