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2,053
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Single Level Dry Developable Resist Systems Based On Gas Phase Silylation
Author(s):
Jack Schellekens
,
Robert-Jan Visser
Publication date:
1989
Journal:
Advances in Resist Technology and Processing VI
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Nanopublications (single, attributable and machine-readable assertions in scientific literature)
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DOI::
10.1117/12.953033
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