Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Abbreviated Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Publisher:
American Vacuum Society
ISSN
(Print):
0734-2101
ISSN
(Electronic):
1520-8559
Publication date Created:
January
1984
Publication date
(Print):
January
1984
Volume: 2
Issue: 1
Pages: 22-28
Article
DOI: 10.1116/1.572619
SO-VID: 95b6d163-bb7b-4021-84e4-9cfad4f15290
Copyright © ©
1984