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CARBON BONDING STATES AND MECHANICAL PROPERTIES OF HYDROGENATED DLC FILMS DEPOSITED IN ELECTROSTATIC AND ELECTROMAGNETIC RF PLASMA MODES
Author(s):
Z Sun
,
S XU
,
K. Ostrikov
,
N. Tsakadze
Publication date:
2002
Journal:
Int. J. Mod. Phys. B
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Photoluminescent Nanomaterials
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DOI::
10.1142/S0217979202010476
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