Stoichiometry effects in TiN diffusion barriers

Joswig, H; Pamler, W.

doi:10.1016/0040-6090(92)90820-2

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Stoichiometry effects in TiN diffusion barriers

Author(s): H Joswig , W Pamler

Publication date Created: December 1992

Publication date (Print): December 1992

Journal: Thin Solid Films

Publisher: Elsevier BV

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Title: Thin Solid Films

Abbreviated Title: Thin Solid Films

Publisher: Elsevier BV

ISSN (Print): 00406090

Publication date Created: December 1992

Publication date (Print): December 1992

Volume: 221

Issue: 1-2

Pages: 228-232

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DOI: 10.1016/0040-6090(92)90820-2

SO-VID: 97617015-df92-4e0f-83d5-383a8b98b8de

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http://www.elsevier.com/tdm/userlicense/1.0/

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Stoichiometry effects in TiN diffusion barriers

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