One-dimensional polycrystalline nanostructures are synthesized by the annealing of the nanowires at 950°C in a reductive Ta vapor ambiance. The formation mechanism of nanostructures is discussed and illustrated in detail. The nucleation and grain growth of crystals were investigated during the formation of the / core-shelled structures. The diffusion-controlled growth is suggested to be the rate-determining step for the diffusion of the Ta atoms through the ash layer to react with O atoms and substitute Si atoms.