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      A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator

      research-article
      Author(s): * , ,
      Publication date (Electronic):
      Journal: Sensors (Basel, Switzerland)
      Publisher: MDPI
      Keywords: disk resonator, MOEMS gyroscope, whispering-gallery mode (WGM)

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          Abstract

          In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle—the transformation process from angular velocity to the resonance wavelength of the WGM resonator—is presented at same time. Next, the analysis conclusions were validated with the help of simulations in ANSYS and FDTD (Finite-Difference Time-Domain) Solutions. Afterwards, some key specifications were estimated based on the results of simulations. Lastly, the fabrication process is detailed.

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          Critical coupling and its control in optical waveguide-ring resonator systems

          A Yariv (2002)
          Article 0 comments Cited 99 times – based on 0 reviews     Review now
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            A high-resolution microchip optomechanical accelerometer

            Alexander Krause, Martin Winger, Tim Blasius … (2012)
            Article 0 comments Cited 75 times – based on 0 reviews     Review now
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              Ultrahigh-quality-factor silicon-on-insulator microring resonator.

              P Haring Bolivar, Heinrich Kurz, Andreas Vörckel … (2004)
              The development of ultrahigh-quality-factor (Q) silicon-on-insulator (SOI) microring resonators based on silicon wire waveguides is presented. An analytical description is derived, illustrating that in addition to low propagation losses the critical coupling condition is essential for optimizing device characteristics. Propagation losses as low as 1.9 +/- 0.1 dB/cm in a curved waveguide with a bending radius of 20 microm and a Q factor as high as 139.000 +/- 6.000 are demonstrated. These are believed to be the highest values reported for a curved SOI waveguide device and for any directly structured semiconductor microring fabricated without additional melting-induced surface smoothing.
              Article 0 comments Cited 43 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Journal ID (nlm-ta): Sensors (Basel)
                Journal ID (iso-abbrev): Sensors (Basel)
                Journal ID (publisher-id): sensors
                Title: Sensors (Basel, Switzerland)
                Publisher: MDPI
                ISSN (Electronic): 1424-8220
                Publication date (Electronic): 21 June 2019
                Publication date Collection: June 2019
                Volume: 19
                Issue: 12
                Electronic Location Identifier: 2798
                Affiliations
                Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China; 220162744@ 123456seu.edu.cn (L.H.); liyezhao@ 123456seu.edu.cn (L.Z.)
                Author notes
                [* ]Correspondence: 101010203@ 123456seu.edu.cn ; Tel./Fax: +86-25-8379-3552
                Article
                Publisher ID: sensors-19-02798
                DOI: 10.3390/s19122798
                PMC ID: 6631629
                PubMed ID: 31234467
                SO-VID: 97d15282-e0db-4a5f-ba9e-e55c2782dead
                Copyright © © 2019 by the authors.
                License:

                Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license ( http://creativecommons.org/licenses/by/4.0/).

                History
                Date received : 06 May 2019
                Date accepted : 03 June 2019
                Categories
                Subject: Article

                ScienceOpen disciplines: Biomedical engineering
                Keywords: disk resonator,moems gyroscope,whispering-gallery mode (wgm)
                Data availability:
                ScienceOpen disciplines: Biomedical engineering
                Keywords: disk resonator, moems gyroscope, whispering-gallery mode (wgm)

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