Interface engineering and chemistry of Hf-based high-k dielectrics on III–V substrates

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Journal

Title: Surface Science Reports

Abbreviated Title: Surface Science Reports

Publisher: Elsevier BV

ISSN (Print): 01675729

Publication date Created: March 2013

Publication date (Print): March 2013

Volume: 68

Issue: 1

Pages: 68-107

Article

DOI: 10.1016/j.surfrep.2013.01.002

SO-VID: 9810a7e2-733f-4327-91b6-a2dd889af703

License:

http://www.elsevier.com/tdm/userlicense/1.0/

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