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      Interface engineering and chemistry of Hf-based high-k dielectrics on III–V substrates

      , ,
      Surface Science Reports
      Elsevier BV

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          Author and article information

          Journal
          Surface Science Reports
          Surface Science Reports
          Elsevier BV
          01675729
          March 2013
          March 2013
          : 68
          : 1
          : 68-107
          Article
          10.1016/j.surfrep.2013.01.002
          9810a7e2-733f-4327-91b6-a2dd889af703
          © 2013

          http://www.elsevier.com/tdm/userlicense/1.0/


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