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X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
Author(s):
S.M.P. Kalaiselvi
,
T.L. Tan
,
A. Talebitaher
,
P. Lee
,
S.P. Heussler
,
M.B.H. Breese
,
R.S. Rawat
Publication date
Created:
March 2015
Publication date
(Print):
March 2015
Journal:
Physics Letters A
Publisher:
Elsevier BV
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Author and article information
Journal
Title:
Physics Letters A
Abbreviated Title:
Physics Letters A
Publisher:
Elsevier BV
ISSN (Print):
03759601
Publication date Created:
March 2015
Publication date (Print):
March 2015
Volume
: 379
Issue
: 6
Pages
: 560-569
Article
DOI:
10.1016/j.physleta.2014.12.007
SO-VID:
9a254272-54ca-471c-9d7d-469913266b1a
Copyright ©
© 2015
License:
https://www.elsevier.com/tdm/userlicense/1.0/
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