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      X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy

      , , , , , ,

      Physics Letters A

      Elsevier BV

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          Journal
          Physics Letters A
          Physics Letters A
          Elsevier BV
          03759601
          March 2015
          March 2015
          : 379
          : 6
          : 560-569
          Article
          10.1016/j.physleta.2014.12.007
          © 2015

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