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      X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy

      Author(s): , , , , , ,

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      Journal: Physics Letters A

      Publisher: Elsevier BV

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          Journal
          Title: Physics Letters A
          Abbreviated Title: Physics Letters A
          Publisher: Elsevier BV
          ISSN (Print): 03759601
          Publication date Created: March 2015
          Publication date (Print): March 2015
          Volume: 379
          Issue: 6
          Pages: 560-569
          Article
          DOI: 10.1016/j.physleta.2014.12.007
          Copyright statement: © 2015
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          https://www.elsevier.com/tdm/userlicense/1.0/

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