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Single-wafer cluster tool performance: an analysis of throughput
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Performance analysis of multi-process semiconductor manufacturing equipment
R.W. Atherton, F.T. Turner, L.F. Atherton … (1990)
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Economic impact of single-wafer multiprocessors
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Multistep In-Situ Single Wafer Processing - Materials Device and Equipment Issues
J. R. HAUSER, N. Masnari, M. Littlejohn (1989)