Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
ISSN
(Electronic):
1361-6439
Publication date Created:
May
01 2010
Publication date
(Print):
May
01 2010
Volume: 20
Issue: 5
Page: 055025
Article
DOI: 10.1088/0960-1317/20/5/055025
SO-VID: 9bedd87e-a4c2-4f4d-8e61-18ff779d07f5
Copyright © ©
2010