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      Unified defect model and beyond

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      Journal of Vacuum Science and Technology
      American Vacuum Society

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          Journal
          Journal of Vacuum Science and Technology
          Journal of Vacuum Science and Technology
          American Vacuum Society
          0022-5355
          September 1980
          September 1980
          : 17
          : 5
          : 1019-1027
          Article
          10.1116/1.570583
          9c845455-cf70-427b-86da-88a8e4703ad8
          © 1980
          History

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