Title:
Journal of Vacuum Science and Technology
Abbreviated Title:
Journal of Vacuum Science and Technology
Publisher:
American Vacuum Society
ISSN
(Print):
0022-5355
Publication date Created:
September
1980
Publication date
(Print):
September
1980
Volume: 17
Issue: 5
Pages: 1019-1027
Article
DOI: 10.1116/1.570583
SO-VID: 9c845455-cf70-427b-86da-88a8e4703ad8
Copyright © ©
1980