General Relationship for the Thermal Oxidation of Silicon

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Journal

Journal ID (publisher-id): JAPIAU

Title: Journal of Applied Physics

Abbreviated Title: J. Appl. Phys.

Publisher: AIP Publishing

ISSN (Print): 00218979

Publication date Created: 1965

Publication date (Print): 1965

Volume: 36

Issue: 12

Page: 3770

Article

DOI: 10.1063/1.1713945

SO-VID: 9dd58f07-3c7a-42d7-bdd1-4dd4a5badbbd

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