Main and side reaction design exceeding the theoretical upper limit of chemical vapor deposition rate

Abstract

Chemical engineering is a branch of engineering that brings together the principles of chemistry, physics, mathematics and biology to use, produce, design and transform energy and materials. Chemical engineering expert Professor Hitoshi Habuka, who is based at the Faculty of Engineering, Division of Materials Science and Chemical Engineering, Yokohama National University in Japan, is leading a team which is interested in creating advanced semiconductor materials through reaction engineering. One of their focuses in recent years has been on exceeding the epitaxial growth rate limit. Epitaxy - which is an important technique to prepare a crystalline film on a single-crystalline substrate - is essential to the manufacturing of devices and circuits association with electronics and photonics.