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Electron cyclotron resonance plasma etching of silicon dioxide for deep-submicron ultralarge scale integrations
Author(s):
Kazuo Nojiri
Publication date:
1995
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Computer Vision, Deep Learning, Deep Reinforcement Learning, IoT
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DOI::
10.1116/1.588170
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