A nanoclustered ceria abrasives with low crystallinity and high Ce3+/Ce4+ ratio for scratch reduction and high oxide removal rates in the chemical mechanical planarization

Kim, Na-Yeon; Kim, Goeun; Sun, Hanna; Hwang, Uiseok; Kim, Junyoung; Kwak, Donggeon; Park, In-Kyung; Kim, Taesung; Suhr, Jonghwan; Nam, Jae-Do

doi:10.1007/s10853-022-07338-x

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A nanoclustered ceria abrasives with low crystallinity and high Ce3+/Ce4+ ratio for scratch reduction and high oxide removal rates in the chemical mechanical planarization

Author(s): Na-Yeon Kim , Goeun Kim , Hanna Sun , Uiseok Hwang , Junyoung Kim , Donggeon Kwak , In-Kyung Park , Taesung Kim , Jonghwan Suhr , Jae-Do Nam

Publication date (Electronic): June 27 2022

Journal: Journal of Materials Science

Publisher: Springer Science and Business Media LLC

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Most cited references 36

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Modified Scherrer Equation to Estimate More Accurately Nano-Crystallite Size Using XRD

Ahmad Monshi, Mohammad Foroughi, Mohammad Monshi (2012)

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Moore's law: past, present and future

R.R. Schaller (1997)

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Size dependency variation in lattice parameter and valency states in nanocrystalline cerium oxide

Sameer K. Deshpande, Swanand Patil, Satyanarayana Kuchibhatla … (2005)

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Jae-Do Nam: (View ORCID Profile)

Journal

Title: Journal of Materials Science

Abbreviated Title: J Mater Sci

Publisher: Springer Science and Business Media LLC

ISSN (Print): 0022-2461

ISSN (Electronic): 1573-4803

Publication date Created: July 2022

Publication date (Electronic): June 27 2022

Publication date (Print): July 2022

Volume: 57

Issue: 26

Pages: 12318-12328

Article

DOI: 10.1007/s10853-022-07338-x

SO-VID: 9f75ce09-5f52-4c75-97b8-192635116afd

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A nanoclustered ceria abrasives with low crystallinity and high Ce3+/Ce4+ ratio for scratch reduction and high oxide removal rates in the chemical mechanical planarization

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HR-EBSD (High Resolution - Electron Back Scatter Diffraction)

Most cited references 36

Modified Scherrer Equation to Estimate More Accurately Nano-Crystallite Size Using XRD

Moore's law: past, present and future

Size dependency variation in lattice parameter and valency states in nanocrystalline cerium oxide

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