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      High-resolution electron backscatter diffraction: An emerging tool for studying local deformation

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      The Journal of Strain Analysis for Engineering Design
      SAGE Publications

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          Some geometrical relations in dislocated crystals

          J.F Nye (1953)
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            High-resolution elastic strain measurement from electron backscatter diffraction patterns: new levels of sensitivity.

            In this paper, we demonstrate that the shift between similar features in two electron backscatter diffraction (EBSD) patterns can be measured using cross-correlation based methods to +/- 0.05 pixels. For a scintillator screen positioned to capture the usual large solid angle employed in EBSD orientation mapping this shift corresponds to only approximately 8.5 x 10(-5)rad at the pattern centre. For wide-angled EBSD patterns, the variation in the entire strain and rotation tensor can be determined from single patterns. Repeated measurements of small rotations applied to a single-crystal sample, determined using the shifts at four widely separated parts of the EBSD patterns, showed a standard deviation of 1.3 x 10(-4) averaged over components of the displacement gradient tensor. Variations in strains and rotations were measured across the interface in a cross-sectioned Si1-x Gex epilayer on a Si substrate. Expansion of the epilayer close to the section surface is accommodated by tensile strains and lattice curvature that extend a considerable distance into the substrate. Smaller and more localised shear strains are observed close to the substrate-layer interface. EBSD provides an impressive and unique combination of high strain sensitivity, high spatial resolution and ease of use.
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              Crystallographic aspects of geometrically-necessary and statistically-stored dislocation density

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                Author and article information

                Journal
                The Journal of Strain Analysis for Engineering Design
                The Journal of Strain Analysis for Engineering Design
                SAGE Publications
                0309-3247
                2041-3130
                February 12 2010
                April 27 2010
                : 45
                : 5
                : 365-376
                Article
                10.1243/03093247JSA587
                a0172ab5-4fa2-462d-890b-d3e5d5612fdc
                © 2010

                http://journals.sagepub.com/page/policies/text-and-data-mining-license

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