Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 2005
Publication date
(Print):
2005
Volume: 23
Issue: 2
Page: 749
Article
DOI: 10.1116/1.1851535
SO-VID: a1dc6e7f-99c4-4047-90d2-8f35a3fbedc3
Copyright © ©
2005