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      Analysis of doping concentration and composition in wide bandgap AlGaN:Si by wavelength dispersive x-ray spectroscopy

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          Most cited references 31

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          First-principles calculations for defects and impurities: Applications to III-nitrides

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            Elastic constants of gallium nitride

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              CASINO V2.42: a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users.

              Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new architecture that provides results twice as quickly. This program is freely available to the scientific community and can be downloaded from the website: (www.gel.usherb.ca/casino).
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                Author and article information

                Journal
                Semiconductor Science and Technology
                Semicond. Sci. Technol.
                IOP Publishing
                0268-1242
                1361-6641
                March 01 2017
                March 01 2017
                February 13 2017
                : 32
                : 3
                : 035020
                10.1088/1361-6641/aa58cf
                © 2017

                http://iopscience.iop.org/info/page/text-and-data-mining

                http://creativecommons.org/licenses/by/3.0/

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