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      HRXRD studies of strain relaxation in ion-implanted strained Si on relaxed Si1−xGex

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          Journal
          Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
          Abbreviated Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
          Publisher: Elsevier BV
          ISSN (Print): 0168583X
          Publication date Created: December 2006
          Publication date (Print): December 2006
          Volume: 253
          Issue: 1-2
          Pages: 22-26
          Article
          DOI: 10.1016/j.nimb.2006.10.008
          SO-VID: a2fe08e9-f650-4aef-b3db-8ef5a7e5f62e
          Copyright © © 2006
          License:

          https://www.elsevier.com/tdm/userlicense/1.0/

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