The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films

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Journal

Title: The Journal of Physical Chemistry C

Abbreviated Title: J. Phys. Chem. C

Publisher: American Chemical Society (ACS)

ISSN (Print): 1932-7447

ISSN (Electronic): 1932-7455

Publication date Created: October 14 2019

Publication date (Electronic): October 14 2019

Affiliations

[1 ]Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden

Article

DOI: 10.1021/acs.jpcc.9b07005

SO-VID: a34ff431-d329-47db-ba1e-456c4c4e08c6

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