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      A megahertz nanomechanical resonator with room temperature quality factor over a million

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      Journal: Applied Physics Letters
      Publisher: AIP Publishing

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          Electromechanical resonators from graphene sheets.

          J. Bunch, Arend van der Zande, Scott Verbridge … (2007)
          Nanoelectromechanical systems were fabricated from single- and multilayer graphene sheets by mechanically exfoliating thin sheets from graphite over trenches in silicon oxide. Vibrations with fundamental resonant frequencies in the megahertz range are actuated either optically or electrically and detected optically by interferometry. We demonstrate room-temperature charge sensitivities down to 8 x 10(-4) electrons per root hertz. The thinnest resonator consists of a single suspended layer of atoms and represents the ultimate limit of two-dimensional nanoelectromechanical systems.
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            Approaching the quantum limit of a nanomechanical resonator.

            M. D. LaHaye, O Buu, B Camarota … (2004)
            By coupling a single-electron transistor to a high-quality factor, 19.7-megahertz nanomechanical resonator, we demonstrate position detection approaching that set by the Heisenberg uncertainty principle limit. At millikelvin temperatures, position resolution a factor of 4.3 above the quantum limit is achieved and demonstrates the near-ideal performance of the single-electron transistor as a linear amplifier. We have observed the resonator's thermal motion at temperatures as low as 56 millikelvin, with quantum occupation factors of NTH = 58. The implications of this experiment reach from the ultimate limits of force microscopy to qubit readout for quantum information devices.
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              Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications.

              Mo Fong Li, H. Tang, M Roukes (2007)
              Scanning probe microscopies (SPM) and cantilever-based sensors generally use low-frequency mechanical devices of microscale dimensions or larger. Almost universally, off-chip methods are used to sense displacement in these devices, but this approach is not suitable for nanoscale devices. Nanoscale mechanical sensors offer a greatly enhanced performance that is unattainable with microscale devices. Here we describe the fabrication and operation of self-sensing nanocantilevers with fundamental mechanical resonances up to very high frequencies (VHF). These devices use integrated electronic displacement transducers based on piezoresistive thin metal films, permitting straightforward and optimal nanodevice readout. This non-optical transduction enables applications requiring previously inaccessible sensitivity and bandwidth, such as fast SPM and VHF force sensing. Detection of 127 MHz cantilever vibrations is demonstrated with a thermomechanical-noise-limited displacement sensitivity of 39 fm Hz(-1/2). Our smallest devices, with dimensions approaching the mean free path at atmospheric pressure, maintain high resonance quality factors in ambient conditions. This enables chemisorption measurements in air at room temperature, with unprecedented mass resolution less than 1 attogram (10(-18) g).
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                Author and article information

                Journal
                Journal ID (publisher-id): APPLAB
                Title: Applied Physics Letters
                Abbreviated Title: Appl. Phys. Lett.
                Publisher: AIP Publishing
                ISSN (Print): 00036951
                Publication date Created: 2008
                Publication date (Print): 2008
                Volume: 92
                Issue: 1
                Page: 013112
                Article
                DOI: 10.1063/1.2822406
                SO-VID: a3d1934b-2c80-47eb-bfc9-f1afe7f97be0
                Copyright © © 2008
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