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      Deterioration and recovery in the resistivity of Al-doped ZnO films prepared by the plasma sputtering

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      Vacuum

      Elsevier BV

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          Journal
          Vacuum
          Vacuum
          Elsevier BV
          0042207X
          December 2009
          December 2009
          : 84
          : 5
          : 625-628
          Article
          10.1016/j.vacuum.2009.06.057
          © 2009

          http://www.elsevier.com/tdm/userlicense/1.0/

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