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      Mg-doped beta-Ga2O3 films deposited by plasma-enhanced atomic layer deposition system for metal-semiconductor-metal ultraviolet C photodetectors

      Author(s): , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Materials Science in Semiconductor Processing
      Publisher: Elsevier BV

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          High gain Ga_2O_3 solar-blind photodetectors realized via a carrier multiplication process

          G. Hu, C. X. Shan, Nan Zhang … (2015)
          Article 0 comments Cited 52 times – based on 0 reviews     Review now
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            Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

            H. B. Profijt, S. Potts, M. van de Sanden … (2011)
            Article 0 comments Cited 48 times – based on 0 reviews     Review now
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              High Responsivity β-Ga2O3 Metal–Semiconductor–Metal Solar-Blind Photodetectors with Ultraviolet Transparent Graphene Electrodes

              Chang-Koo Kim, Sooyeoun Oh, Jihyun Kim (2017)
              Article 0 comments Cited 43 times – based on 0 reviews     Review now
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                Author and article information

                Contributors
                Ching-Ting Lee: (View ORCID Profile)
                Hsin-Ying Lee: (View ORCID Profile)
                Journal
                Title: Materials Science in Semiconductor Processing
                Abbreviated Title: Materials Science in Semiconductor Processing
                Publisher: Elsevier BV
                ISSN (Print): 13698001
                Publication date Created: May 2022
                Publication date (Print): May 2022
                Volume: 142
                Page: 106471
                Article
                DOI: 10.1016/j.mssp.2022.106471
                SO-VID: aa612a10-c50b-4d4d-abb4-1b304058c310
                Copyright © © 2022
                License:

                https://www.elsevier.com/tdm/userlicense/1.0/

                https://doi.org/10.15223/policy-017

                https://doi.org/10.15223/policy-037

                https://doi.org/10.15223/policy-012

                https://doi.org/10.15223/policy-029

                https://doi.org/10.15223/policy-004

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