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GaAs metallization: Some problems and trends
Author(s):
J. M. Woodall
,
J. L. Freeouf
Publication date
Created:
September 1981
Publication date
(Print):
September 1981
Journal:
Journal of Vacuum Science and Technology
Publisher:
American Vacuum Society
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Journal
Title:
Journal of Vacuum Science and Technology
Abbreviated Title:
Journal of Vacuum Science and Technology
Publisher:
American Vacuum Society
ISSN (Print):
0022-5355
Publication date Created:
September 1981
Publication date (Print):
September 1981
Volume
: 19
Issue
: 3
Pages
: 794-798
Article
DOI:
10.1116/1.571150
SO-VID:
ab43a945-c007-4348-91d3-c3ffe0096760
Copyright ©
© 1981
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