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Phosphorus diffusion into silicon from a spin‐on source using rapid thermal processing
Author(s):
B Hartiti
,
A. Slaoui
,
J. Müller
,
R. Stuck
,
P. Siffert
Publication date:
1992
Journal:
Journal of Applied Physics
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Genome Engineering using CRISPR
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DOI::
10.1063/1.350519
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