Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Zhu, Li-Min; Fatikow, Sergej; Ding, Han; Su, Chun-Yi; Gu, Guo-Ying

doi:10.1109/TASE.2014.2352364

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Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Author(s): Guo-Ying Gu , Li-Min Zhu , Chun-Yi Su , Han Ding , Sergej Fatikow

Publication date (Print): January 2016

Journal: IEEE Transactions on Automation Science and Engineering

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

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Most cited references 188

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Theory of ferromagnetic hysteresis

D.L. Atherton, D.C. Jiles (1986)

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PID control system analysis, design, and technology

Kiam Heong Ang, G Chong, Yun Li (2005)

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Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

D. Croft, G. Shed, S Devasia (2001)

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Title: IEEE Transactions on Automation Science and Engineering

Abbreviated Title: IEEE Trans. Automat. Sci. Eng.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 1545-5955

ISSN (Electronic): 1558-3783

Publication date Created: January 2016

Publication date (Print): January 2016

Volume: 13

Issue: 1

Pages: 313-332

Article

DOI: 10.1109/TASE.2014.2352364

SO-VID: ac1da04d-6f0f-4e8f-b82f-33fae7c4a96a

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Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

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Most cited references 188

Theory of ferromagnetic hysteresis

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Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

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