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      New n-Type Transparent Conducting Oxides

      MRS Bulletin
      Cambridge University Press (CUP)

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          Abstract

          Most research to develop highly transparent and conductive thin films has focused onn-type semiconductors consisting of metal oxides. Historically, transparent conducting oxide (TCO) thin films composed of binary compounds such as SnO2and In2O3were developed by means of chemical- and physical-deposition methods. Impurity-doped SnO2(Sb- or F-doped SnO2, e.g., SnO2:Sb or SnO2: F) and In2O3: Sn (indium tin oxide, ITO) films are in practical use. In addition to binary compounds, ternary compounds such as Cd2SnO4, CdSnO3, and CdIn2O4were developed prior to 1980, but their TCO films have not yet been used widely.

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          Most cited references35

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          Transparent conductors—A status review

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            Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

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              Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

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                Author and article information

                Journal
                applab
                MRS Bulletin
                MRS Bull.
                Cambridge University Press (CUP)
                0883-7694
                1938-1425
                August 2000
                January 2011
                : 25
                : 08
                : 38-44
                Article
                10.1557/mrs2000.149
                adc999d4-37bc-43ab-b08f-90645c8c25ca
                © 2000
                History

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