Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
Publication date Created:
November
01 2002
Publication date
(Print):
November
01 2002
Volume: 11
Issue: 4
Pages: 383-388
Article
DOI: 10.1088/0963-0252/11/4/304
SO-VID: b0e94fb8-dcf2-4999-813e-c0447a257ec2
Copyright © ©
2002