Determination of subnanogram per cubic meter concentrations of metals in the air of a trace metal clean room by impaction graphite furnace atomic absorption and laser excited atomic fluorescence spectrometry

Wei, Guor Tzo.; Liang, Zhongwen; Irwin, Richard L.; Sneddon, Joseph; Michel, Robert G.; Walton, Andrew P.

doi:10.1021/ac00213a020

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Determination of subnanogram per cubic meter concentrations of metals in the air of a trace metal clean room by impaction graphite furnace atomic absorption and laser excited atomic fluorescence spectrometry

Author(s): Zhongwen. Liang , Guor Tzo. Wei , Richard L. Irwin , Andrew P. Walton , Robert G. Michel , Joseph. Sneddon

Publication date Created: May 2002

Publication date (Electronic): May 2002

Journal: Analytical Chemistry

Publisher: American Chemical Society (ACS)

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Title: Analytical Chemistry

Abbreviated Title: Anal. Chem.

Publisher: American Chemical Society (ACS)

ISSN (Print): 0003-2700

ISSN (Electronic): 1520-6882

Publication date Created: May 2002

Publication date Created: July 15 1990

Publication date (Electronic): May 2002

Publication date (Print): July 15 1990

Volume: 62

Issue: 14

Pages: 1452-1457

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DOI: 10.1021/ac00213a020

SO-VID: b2b59fb9-baab-4a88-b381-0a4dcea4d1dd

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Determination of subnanogram per cubic meter concentrations of metals in the air of a trace metal clean room by impaction graphite furnace atomic absorption and laser excited atomic fluorescence spectrometry

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