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      Metal deposition from a supported metal film using an excimer laser

      Author(s): , ,
      Publication date Created:
      Publication date (Print):
      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Laser photodeposition of metal films with microscopic features

          R Osgood, T F Deutsch, D. Ehrlich (1979)
          Article 0 comments Cited 52 times – based on 0 reviews     Review now
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            Photodeposition of metal films with ultraviolet laser light

            T F Deutsch, R Osgood, D. Ehrlich (1982)
            Article 0 comments Cited 29 times – based on 0 reviews     Review now
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              Laser Microchemistry and its Application to Electron-Device Fabrication

              R Osgood (1983)
              Article 0 comments Cited 25 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: August 15 1986
                Publication date (Print): August 15 1986
                Volume: 60
                Issue: 4
                Pages: 1538-1539
                Article
                DOI: 10.1063/1.337287
                SO-VID: b33d37d6-c893-4886-94b8-c2f4b130432a
                Copyright © © 1986
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