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      A study of silicide formation by laser irradiation

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      Journal of Applied Physics

      AIP Publishing

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          Most cited references 5

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          Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92,

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            The redistribution of implanted dopants after metal‐silicide formation

             M. Wittmer,  T. Seidel (1978)
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              Dynamics of laser‐induced formation of palladium silicide

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                Author and article information

                Journal
                Journal of Applied Physics
                Journal of Applied Physics
                AIP Publishing
                0021-8979
                1089-7550
                July 1979
                July 1979
                : 50
                : 7
                : 4786-4790
                10.1063/1.326539
                © 1979
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