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      A study of silicide formation by laser irradiation

      Author(s): ,
      Publication date Created:
      Publication date (Print):
      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92,

          W.K. Chu, J.F. Ziegler (1974)
          Article 0 comments Cited 110 times – based on 0 reviews     Review now
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            The redistribution of implanted dopants after metal‐silicide formation

            M. Wittmer, T. Seidel (1978)
            Article 0 comments Cited 36 times – based on 0 reviews     Review now
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              Dynamics of laser‐induced formation of palladium silicide

              M. Wittmer, M. von Allmen (1979)
              Article 0 comments Cited 23 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: July 1979
                Publication date (Print): July 1979
                Volume: 50
                Issue: 7
                Pages: 4786-4790
                Article
                DOI: 10.1063/1.326539
                SO-VID: b4b1399d-0fa4-4094-a088-fcdb79166e87
                Copyright © © 1979
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