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      Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique

      Author(s): , , ,
      Publication date Created:
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      Journal: Thin Solid Films
      Publisher: Elsevier BV

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          Microstructural evolution during film growth

          I. Petrov, P. B. Barna, L Hultman … (2003)
          Article 0 comments Cited 206 times – based on 0 reviews     Review now
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            A novel pulsed magnetron sputter technique utilizing very high target power densities

            Vladímir Kouznetsov, Ivan Petrov, Ulf Helmersson … (1999)
            Article 0 comments Cited 202 times – based on 0 reviews     Review now
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              Influence of high power densities on the composition of pulsed magnetron plasmas

              U. Helmersson, L Hultman, R. New … (2002)
              Article 0 comments Cited 72 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Thin Solid Films
                Abbreviated Title: Thin Solid Films
                Publisher: Elsevier BV
                ISSN (Print): 00406090
                Publication date Created: June 2004
                Publication date (Print): June 2004
                Volume: 457
                Issue: 2
                Pages: 270-277
                Article
                DOI: 10.1016/j.tsf.2003.11.113
                SO-VID: b5bac73a-d47c-4c75-af32-f643a522f9e2
                Copyright © © 2004
                License:

                http://www.elsevier.com/tdm/userlicense/1.0/

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