Title:
IEEE Transactions on Semiconductor Manufacturing
Abbreviated Title:
IEEE Trans. Semicond. Manufact.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
0894-6507
ISSN
(Electronic):
1558-2345
Publication date Created:
February
2015
Publication date
(Print):
February
2015
Volume: 28
Issue: 1
Pages: 55-69
Article
DOI: 10.1109/TSM.2014.2380433
SO-VID: b656a4d4-78b7-4523-a24f-0d49ecf9f223
Copyright © ©
2015