Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date
(Print):
July
1987
Volume: 5
Issue: 4
Page: 1191
Article
DOI: 10.1116/1.583710
SO-VID: b771c337-1c1c-4ea8-818c-9f4cea6fddaf
Copyright © ©
1987