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      Waveguide-coupled AlGaAs / GaAs microcavity ring and disk resonators with high f inesse and 21.6-nm f ree spectral range.

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          Abstract

          We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-microm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mum-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-mum-diameter ring and disk resonators to show the feasibility of such devices.

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          Author and article information

          Journal
          Opt Lett
          Optics letters
          0146-9592
          0146-9592
          Aug 15 1997
          : 22
          : 16
          Article
          36288
          18185808
          b78c0d95-b21c-41f1-86d6-c420bb43b27a
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