Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
August
01 2013
Publication date
(Electronic):
June
26 2013
Volume: 22
Issue: 4
Page: 045010
Article
DOI: 10.1088/0963-0252/22/4/045010
SO-VID: b9930634-aa40-4319-bf68-bcbb196dedc5
Copyright © ©
2013