Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
March
01 2016
Publication date
(Print):
March
01 2016
Volume: 31
Issue: 3
Page: 034001
Article
DOI: 10.1088/0268-1242/31/3/034001
SO-VID: b9f1c15f-b455-4629-95ba-793ba6ddd486
Copyright © ©
2016