Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook

[1 ]Department of Chemical and Biological Engineering, Colorado School of Mines, Golden, Colorado 80401

[2 ]Tyndall National Institute, University College Cork, Cork T12 R5CP, Ireland

[3 ]Schrödinger Inc., 120 West 45th Street, New York, New York 10036

[4 ]Lam Research Corporation, Tualatin, Oregon 97062