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      A review of ultrafast laser materials micromachining

      , , , , , ,
      Optics & Laser Technology
      Elsevier BV

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          Journal
          Optics & Laser Technology
          Optics & Laser Technology
          Elsevier BV
          00303992
          March 2013
          March 2013
          : 46
          :
          : 88-102
          Article
          10.1016/j.optlastec.2012.06.037
          bd861d98-9771-49cc-9c33-9375de727b04
          © 2013

          http://www.elsevier.com/tdm/userlicense/1.0/

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