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      • Record: found
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      The elastic properties of thin-film silicon nitride

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      Author(s): , ,
      Conference name: IEEE Symposium on Ultrasonics
      Conference date: 4-7 Dec. 1990

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          Conference
          Pages: 445-448
          Article
          DOI: 10.1109/ULTSYM.1990.171405
          SO-VID: bf54392f-0c41-4132-a099-216f6d417089
          Conference name: IEEE Symposium on Ultrasonics
          Conference location: Honolulu, HI, USA
          Conference date: 4-7 Dec. 1990
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