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      Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks

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          Journal
          Journal of Microelectromechanical Systems
          J. Microelectromech. Syst.
          Institute of Electrical and Electronics Engineers (IEEE)
          1057-7157
          1941-0158
          June 2017
          June 2017
          : 26
          : 3
          : 601-608
          Article
          10.1109/JMEMS.2017.2680738
          bff31d81-0293-49da-bcdb-afb5e953c92b
          © 2017
          History

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