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5,054
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Hybrid polishing mechanism of single crystal SiC using mixed abrasive slurry (MAS)
Author(s):
H.S. Lee
,
D.I. Kim
,
J.H. An
,
H.J. Lee
,
K.H. Kim
,
H. Jeong
Publication date
Created:
2010
Publication date
(Print):
2010
Journal:
CIRP Annals
Publisher:
Elsevier BV
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There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
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Nanopublications (single, attributable and machine-readable assertions in scientific literature)
Author and article information
Journal
Title:
CIRP Annals
Abbreviated Title:
CIRP Annals
Publisher:
Elsevier BV
ISSN (Print):
00078506
Publication date Created:
2010
Publication date (Print):
2010
Volume
: 59
Issue
: 1
Pages
: 333-336
Article
DOI:
10.1016/j.cirp.2010.03.114
SO-VID:
c06637d9-da51-4aff-a688-d75240700d78
Copyright ©
© 2010
License:
https://www.elsevier.com/tdm/userlicense/1.0/
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