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      Hybrid polishing mechanism of single crystal SiC using mixed abrasive slurry (MAS)

      , , , , ,
      CIRP Annals
      Elsevier BV

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          Journal
          CIRP Annals
          CIRP Annals
          Elsevier BV
          00078506
          2010
          2010
          : 59
          : 1
          : 333-336
          Article
          10.1016/j.cirp.2010.03.114
          c06637d9-da51-4aff-a688-d75240700d78
          © 2010

          https://www.elsevier.com/tdm/userlicense/1.0/

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