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Precise formation of nanoscopic dots on polystyrene film using z-lift electrostatic lithography
Author(s):
S. Juhl
,
D Phillips
,
Richard A. Vaia
,
Igor Lyuksyutov
,
P. B. Paramonov
,
Shane Juhl
,
David Phillips
,
Sergei F. Lyuksyutov
,
Pavel B. Paramonov
,
R Vaia
,
S Lyuksyutov
Publication date:
2004
Journal:
Appl. Phys. Lett.
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Nigerian Journal of Tropical Engineering
Author and article information
Journal
DOI::
10.1063/1.1807012
ScienceOpen disciplines:
General engineering
,
Engineering
,
Chemistry
,
Industrial chemistry
Data availability:
ScienceOpen disciplines:
General engineering
,
Engineering
,
Chemistry
,
Industrial chemistry
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