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SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors
Author(s):
T.P. Smirnova
,
A.M. Badalian
,
L.V. Yakovkina
,
V.V. Kaichev
,
V.I. Bukhtiyarov
,
A.N. Shmakov
,
I.P. Asanov
,
V.I. Rachlin
,
A.N. Fomina
Publication date
Created:
April 2003
Publication date
(Print):
April 2003
Journal:
Thin Solid Films
Publisher:
Elsevier BV
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High Entropy Alloys and Complex Concentrated Alloys
Author and article information
Journal
Title:
Thin Solid Films
Abbreviated Title:
Thin Solid Films
Publisher:
Elsevier BV
ISSN (Print):
00406090
Publication date Created:
April 2003
Publication date (Print):
April 2003
Volume
: 429
Issue
: 1-2
Pages
: 144-151
Article
DOI:
10.1016/S0040-6090(03)00408-5
SO-VID:
c1b3e4b5-19f6-4ab6-901a-3ce01890c0b6
Copyright ©
© 2003
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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