Comparative study of c-axis AlN films sputtered on metallic surfaces

Sanz-Hervás, A.; Vergara, L.; Olivares, J.; Iborra, E; Morilla, Y.; García-López, J.; Clement, M.; Respaldiza, M.A.; Sangrador, J.

doi:10.1016/j.diamond.2004.11.010

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Comparative study of c-axis AlN films sputtered on metallic surfaces

Authors: A. Sanz-Hervás , L. Vergara , J. Olivares , E. Iborra , Y. Morilla , J. García-López , M. Clement , J. Sangrador , M.A. Respaldiza

Publication date (Print): March 2005

Journal: Diamond and Related Materials

Publisher: Elsevier BV

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Title: Diamond and Related Materials

Abbreviated Title: Diamond and Related Materials

Publisher: Elsevier BV

ISSN Print 09259635

Publication date Created March 2005

Publication date (Print): March 2005

Volume: 14

Issue: 3-7

Pages: 1198-1202

ID: 10.1016/j.diamond.2004.11.010

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Self URI (article page): http://linkinghub.elsevier.com/retrieve/pii/S0925963504004157

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Comparative study of c-axis AlN films sputtered on metallic surfaces

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