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    Comparative study of c-axis AlN films sputtered on metallic surfaces

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        Journal
        Title: Diamond and Related Materials
        Abbreviated Title: Diamond and Related Materials
        Publisher: Elsevier BV
        ISSN Print 09259635
        Publication date Created March 2005
        Publication date (Print): March 2005
        Volume: 14
        Issue: 3-7
        Pages: 1198-1202
        DOI: 10.1016/j.diamond.2004.11.010
        Copyright statement: © 2005

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        http://www.elsevier.com/tdm/userlicense/1.0/

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