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      Comparative study of c-axis AlN films sputtered on metallic surfaces

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          Journal
          Diamond and Related Materials
          Diamond and Related Materials
          Elsevier BV
          09259635
          March 2005
          March 2005
          : 14
          : 3-7
          : 1198-1202
          10.1016/j.diamond.2004.11.010
          © 2005

          http://www.elsevier.com/tdm/userlicense/1.0/

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