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Comparative study of c-axis AlN films sputtered on metallic surfaces

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      Journal
      Diamond and Related Materials
      Diamond and Related Materials
      Elsevier BV
      09259635
      March 2005
      March 2005
      : 14
      : 3-7
      : 1198-1202
      10.1016/j.diamond.2004.11.010
      © 2005

      http://www.elsevier.com/tdm/userlicense/1.0/

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