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      Guided fracture of films on soft substrates to create micro/nano-feature arrays with controlled periodicity

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          Abstract

          While the formation of cracks is often stochastic and considered undesirable, controlled fracture would enable rapid and low cost manufacture of micro/nanostructures. Here, we report a propagation-controlled technique to guide fracture of thin films supported on soft substrates to create crack arrays with highly controlled periodicity. Precision crack patterns are obtained by the use of strategically positioned stress-focusing V-notch features under conditions of slow application of strain to a degree where the notch features and intrinsic crack spacing match. This simple but robust approach provides a variety of precisely spaced crack arrays on both flat and curved surfaces. The general principles are applicable to a wide variety of multi-layered materials systems because the method does not require the careful control of defects associated with initiation-controlled approaches. There are also no intrinsic limitations on the area over which such patterning can be performed opening the way for large area micro/nano-manufacturing.

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          Nested self-similar wrinkling patterns in skins.

          Stiff thin films on soft substrates are both ancient and commonplace in nature; for instance, animal skin comprises a stiff epidermis attached to a soft dermis. Although more recent and rare, artificial skins are increasingly used in a broad range of applications, including flexible electronics, tunable diffraction gratings, force spectroscopy in cells, modern metrology methods, and other devices. Here we show that model elastomeric artificial skins wrinkle in a hierarchical pattern consisting of self-similar buckles extending over five orders of magnitude in length scale, ranging from a few nanometres to a few millimetres. We provide a mechanism for the formation of this hierarchical wrinkling pattern, and quantify our experimental findings with both computations and a simple scaling theory. This allows us to harness the substrates for applications. In particular, we show how to use the multigeneration-wrinkled substrate for separating particles based on their size, while simultaneously forming linear chains of monodisperse particles.
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            Patterning by controlled cracking.

            Crack formation drives material failure and is often regarded as a process to be avoided. However, closer examination of cracking phenomena has revealed exquisitely intricate patterns such as spirals, oscillating and branched fracture paths and fractal geometries. Here we demonstrate the controlled initiation, propagation and termination of a variety of channelled crack patterns in a film/substrate system comprising a silicon nitride thin film deposited on a silicon substrate using low-pressure chemical vapour deposition. Micro-notches etched into the silicon substrate concentrated stress for crack initiation, which occurred spontaneously during deposition of the silicon nitride layer. We reproducibly created three distinct crack morphologies--straight, oscillatory and orderly bifurcated (stitchlike)--through careful selection of processing conditions and parameters. We induced direction changes by changing the system parameters, and we terminated propagation at pre-formed multi-step crack stops. We believe that our patterning technique presents new opportunities in nanofabrication and offers a starting point for atomic-scale pattern formation, which would be difficult even with current state-of-the-art nanofabrication methodologies.
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              Tuneable elastomeric nanochannels for nanofluidic manipulation.

              Fluidic transport through nanochannels offers new opportunities to probe fundamental nanoscale transport phenomena and to develop tools for manipulating DNA, proteins, small molecules and nanoparticles. The small size of nanofabricated devices and the accompanying increase in the effect of surface forces, however, pose challenges in designing and fabricating flexible nanofluidic systems that can dynamically adjust their transport characteristics according to the handling needs of various molecules and nanoparticles. Here, we describe the use of nanoscale fracturing of oxidized poly(dimethylsiloxane) to conveniently fabricate nanofluidic systems with arrays of nanochannels that can actively manipulate nanofluidic transport through dynamic modulation of the channel cross-section. We present the design parameters for engineering material properties and channel geometry to achieve reversible nanochannel deformation using remarkably small forces. We demonstrate the versatility of the elastomeric nanochannels through tuneable sieving and trapping of nanoparticles, dynamic manipulation of the conformation of single DNA molecules and in situ photofabrication of movable polymeric nanostructures.
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                Author and article information

                Journal
                Sci Rep
                Sci Rep
                Scientific Reports
                Nature Publishing Group
                2045-2322
                23 October 2013
                2013
                : 3
                : 3027
                Affiliations
                [1 ]Department of Biomedical Engineering, College of Engineering, University of Michigan , 2200 Bonisteel Blvd, Ann Arbor, MI 48109, USA
                [2 ]Macromolecular Science and Engineering Center, College of Engineering, University of Michigan , 2300 Hayward St., Ann Arbor, MI 48109, USA
                [3 ]Department of Mechanical Engineering, College of Engineering, University of Michigan , 2350 Hayward St., Ann Arbor, MI 48109, USA
                [4 ]Department of Materials Science & Engineering, College of Engineering, University of Michigan , 2300 Hayward St., Ann Arbor, MI 48109, USA
                Author notes
                Article
                srep03027
                10.1038/srep03027
                3805969
                24149668
                cb4e13f8-5144-4d3a-a44c-0fbbca3881a2
                Copyright © 2013, Macmillan Publishers Limited. All rights reserved

                This work is licensed under a Creative Commons Attribution-NonCommercial-ShareALike 3.0 Unported License. To view a copy of this license, visit http://creativecommons.org/licenses/by-nc-sa/3.0/

                History
                : 08 April 2013
                : 07 October 2013
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