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Structural and electrophysical properties of femtosecond laser exposed hydrogenated amorphous silicon films
Author(s):
A.V. Emelyanov
,
M.V. Khenkin
,
A.G. Kazanskii
,
P.A. Forsh
,
P.K. Kashkarov
,
E.V. Lyubin
,
A.A. Khomich
,
M. Gecevičius
,
M. Beresna
,
P.G. Kazansky
,
Andrey Emelyanov
,
M. V. Khenkin
,
Andrey G. Kazanskii
,
P. Forsh
,
Pavel Kashkarov
,
Evgeny Lyubin
,
Andrey A. Khomich
,
Mindaugas Gecevičius
,
Martynas Beresna
,
Peter G. Kazansky
Publication date:
2012
Journal:
Proc. SPIE
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Fracture and Structural Integrity
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DOI::
10.1117/12.922896
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